Reliability
Beyond Copper: Ruthenium, Molybdenum and the BEOL Resistance Wall
Bulk ruthenium conducts about four times worse than bulk copper, and bulk molybdenum about three times worse. Both are still serious candidates for the tightest metal layers of future logic. The reason is that a 10 nm wire does not behave like a block of metal, and a copper wire of that width is only about half copper. This post works through the resistivity against line width with a simple published model, shows which inputs decide the answer…