Wafer Cost
What One High-NA Exposure Has to Earn: A Cost-per-Layer Calculation
A high-NA EUV scanner costs far more to run per wafer than a low-NA one, yet it can still win on the layers where it replaces several exposures. In the illustrative model below, one high-NA pass costs about 2.3 times one low-NA pass at the scanner, but the finished layer comes out at about €176 per wafer against about €222 for two low-NA passes. That margin is much less secure than it looks. It falls to about €10 once a large die needs stitchi…